Phoenix Nanotom® HR

Secure yield and reliability in next-generation packaging. 
 

• Characterize TSVs, micro-bumps, solder balls, and RDLs down to the sub-micron range.

• Detect voids, micro-cracks, or misalignments that compromise device performance and reliability.

• Verify die attach uniformity, epoxy distribution, and bond integrity with repeatable stability. 

Detect defects across both fine features and complete assemblies.

• Uncover solder-joint voids, bond defects, and wire bond issues.

• Verify connectors and lead frames with clean imaging.

• Leverage the large-area detector to scan entire components and small ROIs alike.

Reveal structure-property relationships across a wide range of research materials. 
•    Analyze polymers, composites, coatings, and nanoparticle dispersions.
•    Characterize porosity, cracks, and fracture initiation sites in detail. 
•    Rely on mechanical stability for extended research scans. 
•    Use the broad 40-160 kV range to study both light and dense materials.
 

From microfossils to porous rock structures, capture complexity without compromise. 

• Study microfossils, mineral inclusions, and rock porosity.

• Map fracture networks and quantify pore connectivity.

• Characterize multi-phase materials from clays to crystalline structures.

• Capture both low-and high-density phases in a single scan. 

From cells to soft tissues, visualize structures in unprecedented detail without destructive prep.

• Examine biological tissues and soft matter in their natural state.

• Analyze cell morphology, thickness, and growth patterns with high precision.

• Visualize plant structures such as seeds, stems, and leaves in 3D.

• Differentiate fine porosities and dense inclusions in biological samples.

From electrodes to solid-state materials, resolve critical microstructures and interfaces with confidence. 

• Visualize electrode porosity, binder distribution, and electrolyte interfaces with sub-micron clarity.

• Support innovation in solid-state and next-generation batteries by revealing critical material structures.

• Shorten iteration cycles with Fast|Scan mode for rapid R&D feedback. 

Advance innovation across materials and manufacturing with high-resolution, non-destructive imaging.

• Characterize polymers and composites at the microstructural level.

• Evaluate additive powders for inclusions, pores, and voids.

• Accelerate material development and process optimization with consistent, repeatable results.

Every detail, down to 50nm.

The Nanotom HR sets a new benchmark for high-resolution CT, delivering true sub-micron imaging down to 400 nm spatial resolution (JIMA). This isn’t just about smaller voxels — it’s about an entire system engineered for stability and repeatability.

 
The nanofocus X-ray source minimizes drift, while the granite-based manipulator ensures vibration-free positioning across even the longest scans.

For researchers, this means resolving microstructures, porosities, and fine details that conventional CT can’t reach. For manufacturers, it means the confidence to validate complex components with clarity.

This is our most capable research-grade CT yet — precision that doesn’t just measure detail, but reveals it.

Do more in a single scan.

Conventional methods often force a compromise: capture a wider field of view or hold on to the detail. The Nanotom HR reduces that trade-off. With its large-area detector and optimized system geometry, you can scan a larger ROI of samples while maintaining the sub-micron clarity that defines this system.

For many applications — from advanced electronics packaging to research specimens — this means seeing more of the structure in a single scan, without the need for destructive preparation.

The biggest window into sub-micron detail we've ever created — more sample, same detail. 

Only one maintenance per year.

Cutting-edge capability doesn’t have to mean high lifetime cost. Built for reliability, the Nanotom HR is engineered to keep you scanning, not servicing. Its open-tube design reduces service requirements and downtime, even under heavy usage, cutting long-term costs where it matters most.

With just a single maintenance cycle annually, you minimize interruptions and maximize uptime. That means fewer service calls, lower operating costs, and a faster return on investment.

The result: a system that delivers world-class performance without the hidden costs, making high-end CT more sustainable for today’s labs and research environments.
 

Scans up to 5x faster.

With the Nanotom HR, speed no longer comes at the expense of detail. Leveraging advanced sub-micron CT technology, it delivers scans with < 1 µm voxel resolution in minutes — results that used to take hours are now at your fingertips.
 

By combining precision with unmatched throughput, the system empowers labs and R&D centers to accelerate their work. Quicker scans mean faster discoveries, shorter R&D cycles, and more productive workflows — all while maintaining the uncompromising quality that research demands.

The result: innovation without delay — enabling you to make confident decisions sooner, and stay ahead in competitive fields where every second counts.

Sharper contrast, cleaner results. 

Thanks to its nanofocus X-ray tube delivering 300 nm focal spot performance and granite-based manipulator for maximum stability, it produces scans that remain uncompromised — even during the longest, high-magnification runs. 

That means fewer repeats, clearer results the first time, and more confidence in every scan.

The outcome: sharper, more stable, and scientifically reliable data to accelerate discovery and ensure quality at the highest level. 

Effortless operation from day one.

High resolution no longer means high complexity. The Nanotom HR was designed so that ease of use is engineered in from the start.

Automated focal spot alignment removes the need for tedious calibration. A sliding front door, CNC controls and integrated interior camera make sample placement straightforward and secure. Granite-supported rails lock in stability.

Meanwhile, intuitive software guides users through setup and scanning, reducing training demands and shortening ramp-up time.

The result: operators spend less time on setup and more time getting answers.  Every scan is faster to start, easier to trust, and simpler to repeat  — giving you confidence at the console and results you can stand behind. 

Sub-micron CT (often called nano CT ) is a non-destructive X-ray imaging technology that creates high-resolution 3D images with details smaller than one micrometer. This allows for the visualization and analysis of microstructural and cellular features.

The Phoenix Nanotom HR delivers industry-leading 50 nanometer (nm) detail detectability (or 0.05 μm).

This specification represents the smallest feature the system can distinguish and resolve in a sample.

The Nanotom HR delivers a detail detectability of up to 50 nm. The system can achieve JIMA spatial resolution of <0.4 µm and voxel sizes as small as 400 nm.

A nano CT system like the Phoenix Nanotom® HR is used when sub-micron detail, high contrast, and non-destructive 3D inspection are essential for both research and industrial quality control.

The Nanotom HR, in particular, is chosen for its unique combination of premium resolution, speed, and enhanced ease of use compared to other high-resolution imaging methods.