Semiconductors are integral components across a wide range of applications and industries. From consumer electronics, communications, and transportation to energy and healthcare, the role of semiconductors is vital to the effective functioning of the products and services society requires for everyday life.
Companies that manufacture semiconductor wafers know firsthand the challenges they face when choosing the correct equipment in their manufacturing units. These organizations want high performance equipment that is accurate, reliable and meets their unique system requirements. Installing sensors with the latest technology into manufacturing and test equipment can greatly benefit semiconductor manufacturing companies.
At Druck we offer pressure sensors, testing equipment and portable calibrators that perform crucial pressure measurement, calibration and control functions in different Semiconductor applications including:
- Thermal Diffusion/Deposition
- Chemical Vapor Deposition
- Dry Etching
- Chemical Mechanical Polishing
- Mass Flow Calibration
- Production Lines
- Quality Control
Druck's product range incorporates 50 years' experience in designing and manufacturing market leading pressure sensing solutions, testing equipment and portable calibrators. We are one of the most capable pressure solution manufacturers in the market and can provide full reliability as Druck controls every part of manufacture-from silicon wafer through to finished product.
Druck's technology provides peace of mind that you are getting the most accurate data available to help make decisions to keep your business and semiconductor equipment running efficiently.
Mass Flow Measurement
Mass flow meters and controllers measure and control the flow rate of a gas or liquid passing through a line or tube. There are two technologies used in semiconductor mass flow measurement:
- Thermal distribution
- Differential pressure
Both measurements are pressure sensitive, which means a change in applied pressure will affect the mass flow measurement accuracy. Device makers use independent pressure sensors to compensate mass flow measurement error induced by applied pressure. The current trend is to integrate pressure sensors into mass flow meters or mass flow controllers.
The advantage of using pressure sensor in mass flow controllers (MFC) is the response:
- With differential pressure measurement, the MFC can achieve the targeted mass flow much faster than thermal distribution measurement.
- In differential pressure MFC, PID control can be used during flow increase ①, steady state ②, and flow decrease ③.
- While in thermal distribution MFC, PID control can only be used during flow increase①.