High accuracy resonant pressure sensor

The RPS/DPS 8100 incorporates the exciting new TERPS technology. TERPS is a resonant silicon pressure sensor technology platform that provides an order of magnitude greater accuracy and stability than current standard pressure measurement technologies.

In addition to providing the performance and packaging improvements available with TERPS, the RPS/DPS 8100 product line takes advantage of best practices to offer a wide range of pressure and electrical connections to enable a level of customization for your specific requirements never before available in the performance class of this sensor.

The combination of the power of the TERPS technology and the quality, reliability and flexibility of the RPS/DPS 8100 Series offers a truly unique solution for high accuracy and high stability pressure measurement requirements.

Product Overview
  • High precision, ±0.01% FS over compensated temperature range
  • High stability, ±50 ppm FS/year (typical)
  • Wide temperature range, up to -55 to +125°C (-67 to 257°F)
  • Multiple output configurations, RS232, RS485, USB 2.0, CANBus, Frequency & Diode (TTL)
  • Wide selection of pressure and electrical connections to suit specific requirements
  • Low acceleration effects

Base pressure ranges

  • 0 to 2 bar (0 to 30 psi) absolute
  • 0 to 3.5 bar (0 to 50 psi) absolute

Calibrated ranges

  • Barometric: Up to 1.3 bar (18 psi) with minimum span of 350 mbar (5 psi)
  • Low pressure: Up to 2 bar (30 psi) with minimum span of 0.5 bar (7 psi)
  • High pressure: Up to 3.5 bar (50 psi) with minimum span of 1 bar (14 psi)

Note: Values in psi are approximate.

Alternative barometric ranges are available on request.

Higher pressure ranges are available in the RPS/DPS 8000 series.


Pressure containment
7 bar (100 psi)


There are two levels of performance specification:

  • Standard
  • Improved

Specifications include combined effects of non-linearity, hysteresis, repeatability and temperature errors over the compensated temperature range and calibrated pressure range.

Physical specifications

Long term stability
Standard: ±0.02% FS/annum max.
Improved: ±0.01% FS/annum max. (±0.005% FS typical)
Note: Unless otherwise specified, specifications are at the reference
conditions of 25°C (77°F) ±5°C (±9°F)

Orientation (g) sensitivity
Less than 0.05 mbar/g

Storage temperature range
As compensated temperature range

Operating temperature range
As compensated temperature range
(restricted by some electrical connector options)

Pressure media
Non-condensing dry gases compatible with 316L stainless steel, silicon, silicon dioxide, Fluorosilicon RV adhesive and glass 

Ingress protection
See electrical connector section

BS EN 60068-2-6 (2008) sine sweeps 5 Hz to 2 kHz, levels to 20gn
BS EN 60068-2-64 random 10 Hz to 2kHz to 4gn RMS for 1 hour each axis
Less than 0.02% FS effect at any time

DO-160E 9 (figure 7.2) 20 gn 11 ms terminal saw-tooth profile
Negligible calibration change

Pressure connector
Pressure connector should be one of:

  • G1/4 female
  • G1/4 male flat
  • G1/4 male 60° internal cone
  • G1/8 male 60° internal cone
  • 1/4 NPT female
  • 1/4 NPT male
  • 1/8 NPT male
  • M20 x 1.5 male (3mm bore)
  • M14 x 1.5 60° internal cone
  • M12 x 1 internal cone
  • 7/16-20 UNJF male 74° external cone
  • G1/2 male
  • G1/4 quick connect
  • 1/2 NPT male
  • G1/4 male flat long
  • 7/16-20 UNF female
  • Depth cone (G1/4 female)
  • 7/16-20 UNF male short flat
  • 3/8-24 UNJF
  • 1/4 VCR female
  • 1/4 VCR male
  • M12 B/head with 4 mm barb



Datasheets - RPS8100 /DPS8100

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