TERPS® (Trench Etched Resonant Pressure Sensor) Technology
TERPS® is a resonating silicon MEMS (Micro Electro Mechanical Systems) pressure sensor technology that provides the highest level of performance available. The result of several key innovations in design and manufacture this resonating silicon pressure sensor technology is 10 times more accurate and stable than traditional pressure measurement technologies.
Druck’s market-leading, proprietary pressure sensing technology, offers unrivalled accuracy, stability and precision specification when utilised in Druck’s pressure sensor, calibrator, controllers, and pitot static testers.
Through rigorous comparative testing spanning nearly a decade, it is proven that TERPS® technology provides customers with unique unrivalled stability (low drift), accuracy, robustness, and speed in combination.
In like-for-like comparisons, Druck’s pressure portfolio enabled with TERPS® performance can achieve more than 10x more accuracy and 10x more stable than traditional silicon-based sensing technologies. Other available pressure measurement technologies such as quartz, film, or optical pressure do not compare to TERPS®.
TERPS® relies on the straining of a resonant structure to change the frequency of the trasducer, which is proportional with the pressure applied onto the sensor’s diaphragm.
The unique design of TERPS® is the base of its great performance, especially in terms of drift and hysteresis (pressure & temperature).
The TERPS® structure and build has the following characteristics:
- Well defined resonant frequency by using Silicon-on-Insulator (SOI) to control thickness and mass of resonating structure;
- Insensitive to media viscosity by using deep reactive ion etching (DRIE) to create well defined patent structures for dynamic mass and force balance;
- Harsh media isolation by using DRIE to create a complex low impedance sensing technique;
- Low thermal and pressure hysteresis by using silicon fusion bonding (SFB)
- Incredible resonant performance backed up by data – At ±0.0015% FS (15ppm), TERPS® delivers ten times the accuracy and stability of standard silicon sensors. TERPS® has been rigorously tested with third parties with the results available, showing customers the remarkable stability and accuracy for themselves.
- Low cost high performance – More resilient than quartz, TERPS® provides quartz accuracy and stability but with added advantage of being resilient in harsh environment and available at a fraction of the cost of quartz.
- Product flexibility at short lead time – Incorporating TERPS® into the sensor as a sealed unit enables TERPS to be produced with a wide range of variable features. TERPS is delivered quickly, removing the problems associated with quartz lead-times.
- TERPS® Accuracy x10, Precision x10, Stability x10 vs traditional sensing technology
Building on the tried and tested industrial sensing, test and calibration and aerospace pressure portfolio, TERPS® technology enables increased accuracy, longer calibration intervals and long term stability for applications including:
- Aero ground testing
- Hydrology and oceanography
- Level monitoring - tidal, ballast tanks, tsunami detection
- Barometers and weather stations
- Turbine controls and optimisation
- Pressure measurement and control for industrial automation
- World class accuracy and stability means less maintenance and less downtime for calibrations
Druck’s pressure sensors, pressure transducers, provide high performance, stability, quality, accuracy, and quick response – with options to perform in multiple applications and harsh environments.
RPS/DPS8000
The RPS/DPS 8000 is the first product to incorporate the exciting new TERPS technology. TERPS is a resonant silicon pressure sensor technology platform that provides an order of magnitude greater accuracy and stability than current pressure measurement technologies.
Featured
ADTS:
All Druck ADTS units utilize TERPS technology. Doing so provides the units with total accuracies you can trust to test your aircraft inline with RVSM certification.
ADTS542
A small, lightweight and cost-effective portable two-channel Flightline air data test set for 'Aircraft on the Ramp' testing.
Provides pitot static air data validation, leak testing fault finding and avionics instrumentation testing.
Featured
PACE:
The benefits of having TERPS sensors in a PACE controller stems from its inherently stable metrological characteristics; notably the precision and long term stability resulting in low drift and unparalleled measurement repeatability.
PACE CM3
Experience the most accurate pressure control module to date.
Where speed and accuracy combine without compromise.
Featured
Test and Calibration Instrumentation:
Druck portable multifunction calibrators, loop calibrators, transducers, and calibration services use technology in ways that make your day-to-day activities easier to initiate and quicker to execute.
PM620T (TERPS PM)
Interchangeable TERPS® Pressure Modules that dock into an MC620G or PV62X base. The PM620T (or "TERPS PM") has industry leading TERPS technology inside.
