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Principles of CT Operation
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Principles of CT Operation: How does a microfocus X-ray tube work?



In this article:
  • Microfocus X-ray Tubes Enable High-Resolution CT Imaging: These tubes generate X-rays from a tiny focal spot—just a few microns wide—allowing for sharp, micrometer-level imaging essential in industrial computed tomography (CT) applications
  • Electron Beam Generation and Acceleration: Electrons are emitted from a heated filament in a vacuum and accelerated toward a tungsten target using a high-voltage potential (UACC), where they generate X-rays upon impact
  • Magnetic Lenses Focus the Beam: A magnetic lens system narrows the electron beam to a precise focal point, improving image clarity and enabling detailed inspection of small or dense components
  • Grid-Controlled Beam Intensity: The Wehnelt electrode (or grid) regulates the electron beam current via bias voltage (UG), offering precise control over X-ray intensity and exposure
  • Nanofocus Tubes Push Resolution Boundaries: Advanced transmission-style nanofocus tubes use multiple electron lenses to achieve resolutions down to 200 nanometers, supporting cutting-edge applications in electronics, aerospace, and materials science


How does a microfocus X-ray tube work?

In an evacuated tube electrons are emitted from a heated filament and are accelerated towards the anode by the potential difference UACC. Electrons enter through a hole in the anode into a magnetic lens which focuses the electron beam to a small spot of a few microns in diameter on the massive tungsten target (directional tube).

In the tungsten the electronis are abruptly decelerated whereby X-rays are generated. The focal spot represents a very small X-ray source which enables sharpest imaging with micrometer resolution. Latest nanofocus tubes (transmission tube) achieve a detail detectability down to 200 nanometers (0.2 microns) by using multiple electron lenses. The electron beam current is controlled by the bias voltage UG via the Wehnelt electrode („grid“).

Research and Development at University of Michigan